PRV

The PRV is a piezo‑actuated metering valve designed for precise control of gas flow into ultra‑high‑vacuum (UHV) systems. A 0–10 V signal drives a piezo actuator that directly varies the valve’s cross‑sectional area, providing smooth, repeatable flow from the sub‑leak‑rate range up to approximately 11 sccm. The mechanism is purely mechanical, so the PRV performs consistently with any gas—no thermal sensor, no gas‑specific calibration, and no conversion factors. The sapphire‑on‑sapphire seal is wear‑free and bakeable, the valve is normally closed and fail‑safe, and it operates through a single BNC control line with no separate 24 V supply.