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Vacuum Leak Rate UHV <5x10-10 mbar l/s
Size or DN DN63CF (4 ½ " OD flange)
Compliance ISO 3669:2017
Vacuum Seal Annealed Cu Gasket
Body Material Stainless Steel 304
Temperature Range 400°C max 5°C per minute
Transmission 180-5500nm, 70% at 250nm
Inside Diameter 36mm
Dimension A 2
Parallelism <3 arc min.
Surface Finish 20-10 scratch-dig
Optical Material DUV grade Sapphire, 90° Orientation
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