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PRICES INCLUDE IMPORT DUTY, BROKERAGE FEES & TAXES, AND INTERNATIONAL SHIPPING
Vacuum Leak Rate UHV <5x10-10 mbar l/s
Size or DN DN63CF (4 ½ " OD flange)
Compliance ISO 3669:2017
Vacuum Seal Annealed Cu Gasket
Body Material Stainless Steel 304
Temperature Range -100°C to 200°C
Transmission >99.5%@ 193nm
Inside Diameter 68mm
Dimension A 6.4
Flatness λ/4 @632nm
Parallelism <10 arc sec
Surface Finish 20-10 Scratch-dig
Optical Material Excimer EUV grade Fused Silica, grade A 3D
Optical Range 180-2000nm
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