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Vacuum Leak Rate UHV <5x10-10 mbar l/s
Size or DN DN100CF (6” OD flange)
Compliance ISO 3669:2017
Vacuum Seal Annealed Cu Gasket
Body Material Stainless Steel 304
Temperature Range -100°C to 200°C max. 50°C per min
Transmission >90%@ 250nm
Inside Diameter 98mm
Dimension A 6.4
Parallelism <30 arc sec
Surface Finish 40-20 Scratch-dig
Optical Material UV Fused Silica grade F, 2D
Optical Range 200-2000nm
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