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Vacuum Leak Rate UHV <5x10-10 mbar l/s
Size or DN DN16CF (1.33” OD flange)
Compliance ISO 3669:2017
Vacuum Seal Cu Gasket
Body Material Stainless Steel 316LN /Ti sleeve
Temperature Range -100°C to 200°C
Inside Diameter 16mm
Flatness λ/4 @632nm
Parallelism <10 arc sec
Surface Finish 20-10 Scratch-dig
Optical Material DUV Fused Silica grade A 3D
Surface Material 20-10 Scratch-dig
Optical Range 200-2000nm
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